JPS5197380A - - Google Patents

Info

Publication number
JPS5197380A
JPS5197380A JP2227375A JP2227375A JPS5197380A JP S5197380 A JPS5197380 A JP S5197380A JP 2227375 A JP2227375 A JP 2227375A JP 2227375 A JP2227375 A JP 2227375A JP S5197380 A JPS5197380 A JP S5197380A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2227375A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2227375A priority Critical patent/JPS5197380A/ja
Publication of JPS5197380A publication Critical patent/JPS5197380A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2227375A 1975-02-21 1975-02-21 Pending JPS5197380A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2227375A JPS5197380A (enrdf_load_stackoverflow) 1975-02-21 1975-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2227375A JPS5197380A (enrdf_load_stackoverflow) 1975-02-21 1975-02-21

Publications (1)

Publication Number Publication Date
JPS5197380A true JPS5197380A (enrdf_load_stackoverflow) 1976-08-26

Family

ID=12078144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2227375A Pending JPS5197380A (enrdf_load_stackoverflow) 1975-02-21 1975-02-21

Country Status (1)

Country Link
JP (1) JPS5197380A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192954A (en) * 1981-05-23 1982-11-27 Dainippon Screen Mfg Co Ltd Surface processing method
JP2003015270A (ja) * 2001-06-28 2003-01-15 Raitoron Kk 位相シフトマスク検査装置及び位相シフトマスク検査方法
JP2014059154A (ja) * 2012-09-14 2014-04-03 Ricoh Co Ltd 光学素子の検査方法、及び光学素子の検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192954A (en) * 1981-05-23 1982-11-27 Dainippon Screen Mfg Co Ltd Surface processing method
JP2003015270A (ja) * 2001-06-28 2003-01-15 Raitoron Kk 位相シフトマスク検査装置及び位相シフトマスク検査方法
JP2014059154A (ja) * 2012-09-14 2014-04-03 Ricoh Co Ltd 光学素子の検査方法、及び光学素子の検査装置

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