JPS5197380A - - Google Patents
Info
- Publication number
- JPS5197380A JPS5197380A JP2227375A JP2227375A JPS5197380A JP S5197380 A JPS5197380 A JP S5197380A JP 2227375 A JP2227375 A JP 2227375A JP 2227375 A JP2227375 A JP 2227375A JP S5197380 A JPS5197380 A JP S5197380A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2227375A JPS5197380A (en) | 1975-02-21 | 1975-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2227375A JPS5197380A (en) | 1975-02-21 | 1975-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5197380A true JPS5197380A (en) | 1976-08-26 |
Family
ID=12078144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2227375A Pending JPS5197380A (en) | 1975-02-21 | 1975-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5197380A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192954A (en) * | 1981-05-23 | 1982-11-27 | Dainippon Screen Mfg Co Ltd | Surface processing method |
| JP2003015270A (en) * | 2001-06-28 | 2003-01-15 | Raitoron Kk | Device and method for inspecting phase shift mask |
| JP2014059154A (en) * | 2012-09-14 | 2014-04-03 | Ricoh Co Ltd | Inspection method of optical element and inspection device of optical element |
-
1975
- 1975-02-21 JP JP2227375A patent/JPS5197380A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192954A (en) * | 1981-05-23 | 1982-11-27 | Dainippon Screen Mfg Co Ltd | Surface processing method |
| JPH0155447B2 (en) * | 1981-05-23 | 1989-11-24 | Dainippon Screen Mfg | |
| JP2003015270A (en) * | 2001-06-28 | 2003-01-15 | Raitoron Kk | Device and method for inspecting phase shift mask |
| JP4518704B2 (en) * | 2001-06-28 | 2010-08-04 | ライトロン株式会社 | Phase shift mask inspection apparatus and phase shift mask inspection method |
| JP2014059154A (en) * | 2012-09-14 | 2014-04-03 | Ricoh Co Ltd | Inspection method of optical element and inspection device of optical element |