JPS5196363U - - Google Patents

Info

Publication number
JPS5196363U
JPS5196363U JP1420775U JP1420775U JPS5196363U JP S5196363 U JPS5196363 U JP S5196363U JP 1420775 U JP1420775 U JP 1420775U JP 1420775 U JP1420775 U JP 1420775U JP S5196363 U JPS5196363 U JP S5196363U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1420775U
Other languages
Japanese (ja)
Other versions
JPS543646Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1420775U priority Critical patent/JPS543646Y2/ja
Publication of JPS5196363U publication Critical patent/JPS5196363U/ja
Application granted granted Critical
Publication of JPS543646Y2 publication Critical patent/JPS543646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1420775U 1975-01-31 1975-01-31 Expired JPS543646Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1420775U JPS543646Y2 (enExample) 1975-01-31 1975-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1420775U JPS543646Y2 (enExample) 1975-01-31 1975-01-31

Publications (2)

Publication Number Publication Date
JPS5196363U true JPS5196363U (enExample) 1976-08-02
JPS543646Y2 JPS543646Y2 (enExample) 1979-02-20

Family

ID=28092492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1420775U Expired JPS543646Y2 (enExample) 1975-01-31 1975-01-31

Country Status (1)

Country Link
JP (1) JPS543646Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020107904A (ja) * 2020-03-13 2020-07-09 光洋サーモシステム株式会社 熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020107904A (ja) * 2020-03-13 2020-07-09 光洋サーモシステム株式会社 熱処理装置
JP2021143822A (ja) * 2020-03-13 2021-09-24 光洋サーモシステム株式会社 熱処理装置
JP2021143823A (ja) * 2020-03-13 2021-09-24 光洋サーモシステム株式会社 熱処理装置

Also Published As

Publication number Publication date
JPS543646Y2 (enExample) 1979-02-20

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