JPS519617B1 - - Google Patents

Info

Publication number
JPS519617B1
JPS519617B1 JP46044573A JP4457371A JPS519617B1 JP S519617 B1 JPS519617 B1 JP S519617B1 JP 46044573 A JP46044573 A JP 46044573A JP 4457371 A JP4457371 A JP 4457371A JP S519617 B1 JPS519617 B1 JP S519617B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP46044573A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS519617B1 publication Critical patent/JPS519617B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/08—Shutters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Control For Cameras (AREA)
JP46044573A 1970-09-15 1971-06-22 Pending JPS519617B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7235970A 1970-09-15 1970-09-15

Publications (1)

Publication Number Publication Date
JPS519617B1 true JPS519617B1 (enrdf_load_stackoverflow) 1976-03-29

Family

ID=22107076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46044573A Pending JPS519617B1 (enrdf_load_stackoverflow) 1970-09-15 1971-06-22

Country Status (4)

Country Link
US (1) US3695154A (enrdf_load_stackoverflow)
JP (1) JPS519617B1 (enrdf_load_stackoverflow)
FR (1) FR2098005A5 (enrdf_load_stackoverflow)
GB (1) GB1335311A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836916A (en) * 1973-02-26 1974-09-17 Ibm Apparatus for exposing lines on a photosensitive surface
US3950763A (en) * 1974-10-29 1976-04-13 California Computer Products, Inc. Cathode ray tube lighthead
US4176926A (en) * 1976-09-28 1979-12-04 Quest Automation Limited Optical projection apparatus
US4231659A (en) * 1979-04-11 1980-11-04 The Gerber Scientific Instrument Company Method of making an overlay mask and a printing plate therefrom
US4249808A (en) * 1979-08-10 1981-02-10 The Gerber Scientific Instrument Company Photoplotting in color with exposure budgeting
US4363539A (en) * 1981-07-20 1982-12-14 Gerber Scientific, Inc. Photohead with flashing beam
US4500182A (en) * 1982-12-27 1985-02-19 Nicolet Instrument Corporation Photoplotter
US4573779A (en) * 1983-12-30 1986-03-04 International Business Machines Corporation Variable size circular aperture camera
US4566015A (en) * 1984-06-07 1986-01-21 Polaroid Corporation Image recording apparatus with adjustable mask
US4675702A (en) * 1986-03-14 1987-06-23 Gerber Scientific Inc. Photoplotter using a light valve device and process for exposing graphics
DE3620017A1 (de) * 1986-06-13 1987-12-17 Mivatec Gmbh Fotoplotverfahren und fotoplotter zum belichten eines films
DE8804625U1 (de) * 1988-04-08 1988-06-09 Winter, Hans-Joachim, 2000 Hamburg Zeichenmaschine mit Zeichenstift
DE102008018763A1 (de) * 2008-04-14 2009-11-05 Kristin Bartsch Lithografiebelichtungseinrichtung

Also Published As

Publication number Publication date
DE2136504B2 (de) 1975-08-21
GB1335311A (en) 1973-10-24
FR2098005A5 (enrdf_load_stackoverflow) 1972-03-03
US3695154A (en) 1972-10-03
DE2136504A1 (de) 1972-03-16

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