JPS5195988A - - Google Patents

Info

Publication number
JPS5195988A
JPS5195988A JP50020335A JP2033575A JPS5195988A JP S5195988 A JPS5195988 A JP S5195988A JP 50020335 A JP50020335 A JP 50020335A JP 2033575 A JP2033575 A JP 2033575A JP S5195988 A JPS5195988 A JP S5195988A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50020335A
Other languages
Japanese (ja)
Other versions
JPS5538028B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2033575A priority Critical patent/JPS5538028B2/ja
Publication of JPS5195988A publication Critical patent/JPS5195988A/ja
Publication of JPS5538028B2 publication Critical patent/JPS5538028B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2033575A 1975-02-20 1975-02-20 Expired JPS5538028B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2033575A JPS5538028B2 (enExample) 1975-02-20 1975-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2033575A JPS5538028B2 (enExample) 1975-02-20 1975-02-20

Publications (2)

Publication Number Publication Date
JPS5195988A true JPS5195988A (enExample) 1976-08-23
JPS5538028B2 JPS5538028B2 (enExample) 1980-10-01

Family

ID=12024255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2033575A Expired JPS5538028B2 (enExample) 1975-02-20 1975-02-20

Country Status (1)

Country Link
JP (1) JPS5538028B2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4110661Y1 (enExample) * 1964-02-19 1966-05-19
JPS432981Y1 (enExample) * 1965-11-08 1968-02-07
JPS4838304A (enExample) * 1971-09-16 1973-06-06

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4110661Y1 (enExample) * 1964-02-19 1966-05-19
JPS432981Y1 (enExample) * 1965-11-08 1968-02-07
JPS4838304A (enExample) * 1971-09-16 1973-06-06

Also Published As

Publication number Publication date
JPS5538028B2 (enExample) 1980-10-01

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