JPS5195988A - - Google Patents

Info

Publication number
JPS5195988A
JPS5195988A JP50020335A JP2033575A JPS5195988A JP S5195988 A JPS5195988 A JP S5195988A JP 50020335 A JP50020335 A JP 50020335A JP 2033575 A JP2033575 A JP 2033575A JP S5195988 A JPS5195988 A JP S5195988A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50020335A
Other languages
Japanese (ja)
Other versions
JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2033575A priority Critical patent/JPS5538028B2/ja
Publication of JPS5195988A publication Critical patent/JPS5195988A/ja
Publication of JPS5538028B2 publication Critical patent/JPS5538028B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2033575A 1975-02-20 1975-02-20 Expired JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2033575A JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-20 1975-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2033575A JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-20 1975-02-20

Publications (2)

Publication Number Publication Date
JPS5195988A true JPS5195988A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-23
JPS5538028B2 JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-10-01

Family

ID=12024255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2033575A Expired JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-20 1975-02-20

Country Status (1)

Country Link
JP (1) JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4110661Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1964-02-19 1966-05-19
JPS432981Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-11-08 1968-02-07
JPS4838304A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-16 1973-06-06

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4110661Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1964-02-19 1966-05-19
JPS432981Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1965-11-08 1968-02-07
JPS4838304A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-16 1973-06-06

Also Published As

Publication number Publication date
JPS5538028B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-10-01

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