JPS5194111A - - Google Patents
Info
- Publication number
- JPS5194111A JPS5194111A JP50020659A JP2065975A JPS5194111A JP S5194111 A JPS5194111 A JP S5194111A JP 50020659 A JP50020659 A JP 50020659A JP 2065975 A JP2065975 A JP 2065975A JP S5194111 A JPS5194111 A JP S5194111A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2065975A JPS6024578B2 (ja) | 1975-02-18 | 1975-02-18 | スパツタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2065975A JPS6024578B2 (ja) | 1975-02-18 | 1975-02-18 | スパツタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5194111A true JPS5194111A (cs) | 1976-08-18 |
| JPS6024578B2 JPS6024578B2 (ja) | 1985-06-13 |
Family
ID=12033328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2065975A Expired JPS6024578B2 (ja) | 1975-02-18 | 1975-02-18 | スパツタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6024578B2 (cs) |
-
1975
- 1975-02-18 JP JP2065975A patent/JPS6024578B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6024578B2 (ja) | 1985-06-13 |