JPS5193875A - - Google Patents

Info

Publication number
JPS5193875A
JPS5193875A JP1920975A JP1920975A JPS5193875A JP S5193875 A JPS5193875 A JP S5193875A JP 1920975 A JP1920975 A JP 1920975A JP 1920975 A JP1920975 A JP 1920975A JP S5193875 A JPS5193875 A JP S5193875A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1920975A
Other languages
Japanese (ja)
Other versions
JPS5322426B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1920975A priority Critical patent/JPS5322426B2/ja
Publication of JPS5193875A publication Critical patent/JPS5193875A/ja
Publication of JPS5322426B2 publication Critical patent/JPS5322426B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP1920975A 1975-02-15 1975-02-15 Expired JPS5322426B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1920975A JPS5322426B2 (cs) 1975-02-15 1975-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1920975A JPS5322426B2 (cs) 1975-02-15 1975-02-15

Publications (2)

Publication Number Publication Date
JPS5193875A true JPS5193875A (cs) 1976-08-17
JPS5322426B2 JPS5322426B2 (cs) 1978-07-08

Family

ID=11992965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1920975A Expired JPS5322426B2 (cs) 1975-02-15 1975-02-15

Country Status (1)

Country Link
JP (1) JPS5322426B2 (cs)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105271A (cs) * 1975-03-13 1976-09-17 Ulvac Corp
JPS5352073A (en) * 1976-10-22 1978-05-12 Hoya Denshi Kk Photomask for ic
JPS53151470U (cs) * 1977-05-04 1978-11-29
JPS55121441A (en) * 1979-03-14 1980-09-18 Fujitsu Ltd Mask for far ultraviolet exposure
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side
JPS6252550A (ja) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp フオトマスク材料
JPS6332553A (ja) * 1986-07-25 1988-02-12 Hoya Corp フオトマスクブランクとフオトマスク
JPS6333124U (cs) * 1987-08-07 1988-03-03

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105271A (cs) * 1975-03-13 1976-09-17 Ulvac Corp
JPS5352073A (en) * 1976-10-22 1978-05-12 Hoya Denshi Kk Photomask for ic
JPS53151470U (cs) * 1977-05-04 1978-11-29
JPS55121441A (en) * 1979-03-14 1980-09-18 Fujitsu Ltd Mask for far ultraviolet exposure
JPS5664342A (en) * 1979-10-29 1981-06-01 Ulvac Corp Photomask original plate having protective film on reverse side
JPS6252550A (ja) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp フオトマスク材料
JPS6332553A (ja) * 1986-07-25 1988-02-12 Hoya Corp フオトマスクブランクとフオトマスク
JPS6333124U (cs) * 1987-08-07 1988-03-03

Also Published As

Publication number Publication date
JPS5322426B2 (cs) 1978-07-08

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