JPS5193238A - Kenbikyono jidoshotensochi - Google Patents

Kenbikyono jidoshotensochi

Info

Publication number
JPS5193238A
JPS5193238A JP1793675A JP1793675A JPS5193238A JP S5193238 A JPS5193238 A JP S5193238A JP 1793675 A JP1793675 A JP 1793675A JP 1793675 A JP1793675 A JP 1793675A JP S5193238 A JPS5193238 A JP S5193238A
Authority
JP
Japan
Prior art keywords
kenbikyono
jidoshotensochi
kenbikyono jidoshotensochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1793675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5610601B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1793675A priority Critical patent/JPS5193238A/ja
Priority to US05/563,952 priority patent/US3984678A/en
Publication of JPS5193238A publication Critical patent/JPS5193238A/ja
Publication of JPS5610601B2 publication Critical patent/JPS5610601B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lens Barrels (AREA)
  • Automatic Focus Adjustment (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1793675A 1974-04-05 1975-02-14 Kenbikyono jidoshotensochi Granted JPS5193238A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1793675A JPS5193238A (en) 1975-02-14 1975-02-14 Kenbikyono jidoshotensochi
US05/563,952 US3984678A (en) 1974-04-05 1975-03-31 Apparatus for automatically adjusting a microscope in focus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1793675A JPS5193238A (en) 1975-02-14 1975-02-14 Kenbikyono jidoshotensochi

Publications (2)

Publication Number Publication Date
JPS5193238A true JPS5193238A (en) 1976-08-16
JPS5610601B2 JPS5610601B2 (enrdf_load_stackoverflow) 1981-03-09

Family

ID=11957653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1793675A Granted JPS5193238A (en) 1974-04-05 1975-02-14 Kenbikyono jidoshotensochi

Country Status (1)

Country Link
JP (1) JPS5193238A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107825A (enrdf_load_stackoverflow) * 1975-03-19 1976-09-24 Hitachi Ltd

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50132937A (enrdf_load_stackoverflow) * 1974-04-05 1975-10-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50132937A (enrdf_load_stackoverflow) * 1974-04-05 1975-10-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107825A (enrdf_load_stackoverflow) * 1975-03-19 1976-09-24 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5610601B2 (enrdf_load_stackoverflow) 1981-03-09

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