JPS5192178A - - Google Patents
Info
- Publication number
- JPS5192178A JPS5192178A JP1769375A JP1769375A JPS5192178A JP S5192178 A JPS5192178 A JP S5192178A JP 1769375 A JP1769375 A JP 1769375A JP 1769375 A JP1769375 A JP 1769375A JP S5192178 A JPS5192178 A JP S5192178A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1769375A JPS5192178A (de) | 1975-02-10 | 1975-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1769375A JPS5192178A (de) | 1975-02-10 | 1975-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5192178A true JPS5192178A (de) | 1976-08-12 |
Family
ID=11950882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1769375A Pending JPS5192178A (de) | 1975-02-10 | 1975-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5192178A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62155515A (ja) * | 1985-12-27 | 1987-07-10 | Mitsubishi Electric Corp | X線露光用マスクの製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4959575A (de) * | 1972-06-29 | 1974-06-10 | ||
JPS4959576A (de) * | 1972-06-29 | 1974-06-10 |
-
1975
- 1975-02-10 JP JP1769375A patent/JPS5192178A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4959575A (de) * | 1972-06-29 | 1974-06-10 | ||
JPS4959576A (de) * | 1972-06-29 | 1974-06-10 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62155515A (ja) * | 1985-12-27 | 1987-07-10 | Mitsubishi Electric Corp | X線露光用マスクの製造方法 |
JPH0328047B2 (de) * | 1985-12-27 | 1991-04-17 | Mitsubishi Electric Corp |