JPS5191737A - - Google Patents
Info
- Publication number
- JPS5191737A JPS5191737A JP1706875A JP1706875A JPS5191737A JP S5191737 A JPS5191737 A JP S5191737A JP 1706875 A JP1706875 A JP 1706875A JP 1706875 A JP1706875 A JP 1706875A JP S5191737 A JPS5191737 A JP S5191737A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1706875A JPS5191737A (me) | 1975-02-10 | 1975-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1706875A JPS5191737A (me) | 1975-02-10 | 1975-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5191737A true JPS5191737A (me) | 1976-08-11 |
Family
ID=11933658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1706875A Pending JPS5191737A (me) | 1975-02-10 | 1975-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5191737A (me) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572522A (en) * | 1980-06-05 | 1982-01-07 | Dainippon Printing Co Ltd | Defect inspecting device for regular pattern |
JPS58158921A (ja) * | 1982-03-16 | 1983-09-21 | Dainippon Printing Co Ltd | 規則性パタ−ンの欠陥検査装置 |
JPS5965428A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | 異物検査装置 |
JPH0510889A (ja) * | 1991-10-28 | 1993-01-19 | Hitachi Ltd | 異物検査方法 |
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1975
- 1975-02-10 JP JP1706875A patent/JPS5191737A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572522A (en) * | 1980-06-05 | 1982-01-07 | Dainippon Printing Co Ltd | Defect inspecting device for regular pattern |
JPS632041B2 (me) * | 1980-06-05 | 1988-01-16 | Dainippon Printing Co Ltd | |
JPS58158921A (ja) * | 1982-03-16 | 1983-09-21 | Dainippon Printing Co Ltd | 規則性パタ−ンの欠陥検査装置 |
JPS5965428A (ja) * | 1982-10-06 | 1984-04-13 | Hitachi Ltd | 異物検査装置 |
JPH0430574B2 (me) * | 1982-10-06 | 1992-05-22 | ||
JPH0510889A (ja) * | 1991-10-28 | 1993-01-19 | Hitachi Ltd | 異物検査方法 |