JPS5191673A - - Google Patents
Info
- Publication number
- JPS5191673A JPS5191673A JP50008927A JP892775A JPS5191673A JP S5191673 A JPS5191673 A JP S5191673A JP 50008927 A JP50008927 A JP 50008927A JP 892775 A JP892775 A JP 892775A JP S5191673 A JPS5191673 A JP S5191673A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP892775A JPS54373B2 (ja�@�@) | 1975-01-20 | 1975-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP892775A JPS54373B2 (ja�@�@) | 1975-01-20 | 1975-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5191673A true JPS5191673A (ja�@�@) | 1976-08-11 |
| JPS54373B2 JPS54373B2 (ja�@�@) | 1979-01-10 |
Family
ID=11706281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP892775A Expired JPS54373B2 (ja�@�@) | 1975-01-20 | 1975-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54373B2 (ja�@�@) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53113072U (ja�@�@) * | 1977-02-15 | 1978-09-08 | ||
| WO2002050334A3 (en) * | 2000-12-19 | 2002-08-22 | Applied Materials Inc | On-site cleaning gas generation for process chamber cleaning |
-
1975
- 1975-01-20 JP JP892775A patent/JPS54373B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53113072U (ja�@�@) * | 1977-02-15 | 1978-09-08 | ||
| WO2002050334A3 (en) * | 2000-12-19 | 2002-08-22 | Applied Materials Inc | On-site cleaning gas generation for process chamber cleaning |
| US6843258B2 (en) | 2000-12-19 | 2005-01-18 | Applied Materials, Inc. | On-site cleaning gas generation for process chamber cleaning |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54373B2 (ja�@�@) | 1979-01-10 |