JPS5190944A - Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho - Google Patents

Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho

Info

Publication number
JPS5190944A
JPS5190944A JP1525475A JP1525475A JPS5190944A JP S5190944 A JPS5190944 A JP S5190944A JP 1525475 A JP1525475 A JP 1525475A JP 1525475 A JP1525475 A JP 1525475A JP S5190944 A JPS5190944 A JP S5190944A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1525475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5416454B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1525475A priority Critical patent/JPS5190944A/ja
Publication of JPS5190944A publication Critical patent/JPS5190944A/ja
Publication of JPS5416454B2 publication Critical patent/JPS5416454B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • ing And Chemical Polishing (AREA)
JP1525475A 1975-02-07 1975-02-07 Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho Granted JPS5190944A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1525475A JPS5190944A (ja) 1975-02-07 1975-02-07 Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1525475A JPS5190944A (ja) 1975-02-07 1975-02-07 Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho

Publications (2)

Publication Number Publication Date
JPS5190944A true JPS5190944A (ja) 1976-08-10
JPS5416454B2 JPS5416454B2 (enExample) 1979-06-22

Family

ID=11883707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1525475A Granted JPS5190944A (ja) 1975-02-07 1975-02-07 Hishoshitsukarukogenaidohakumakuomochiirufuotoetsuchingunohoho

Country Status (1)

Country Link
JP (1) JPS5190944A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145174A (en) * 1979-04-26 1980-11-12 Tdk Corp Etching method of amorphous alloy material
CN1060821C (zh) * 1997-08-06 2001-01-17 复旦大学 多层硅微机械结构的掩模－无掩模腐蚀技术

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145174A (en) * 1979-04-26 1980-11-12 Tdk Corp Etching method of amorphous alloy material
CN1060821C (zh) * 1997-08-06 2001-01-17 复旦大学 多层硅微机械结构的掩模－无掩模腐蚀技术

Also Published As

Publication number Publication date
JPS5416454B2 (enExample) 1979-06-22

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