JPS5190814A - - Google Patents
Info
- Publication number
- JPS5190814A JPS5190814A JP50012980A JP1298075A JPS5190814A JP S5190814 A JPS5190814 A JP S5190814A JP 50012980 A JP50012980 A JP 50012980A JP 1298075 A JP1298075 A JP 1298075A JP S5190814 A JPS5190814 A JP S5190814A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Polymerisation Methods In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50012980A JPS5190814A (en) | 1975-02-01 | 1975-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50012980A JPS5190814A (en) | 1975-02-01 | 1975-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5190814A true JPS5190814A (en) | 1976-08-09 |
Family
ID=11820350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50012980A Pending JPS5190814A (en) | 1975-02-01 | 1975-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5190814A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63233953A (en) * | 1978-07-20 | 1988-09-29 | ケンリツチ ペトロケミカルズ，インコーポレーテツド | Cumylphenol derivative |
-
1975
- 1975-02-01 JP JP50012980A patent/JPS5190814A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63233953A (en) * | 1978-07-20 | 1988-09-29 | ケンリツチ ペトロケミカルズ，インコーポレーテツド | Cumylphenol derivative |
| JPH0448787B2 (en) * | 1978-07-20 | 1992-08-07 | Kenrich Petrochemicals |