JPS5190604A - - Google Patents
Info
- Publication number
- JPS5190604A JPS5190604A JP50013475A JP1347575A JPS5190604A JP S5190604 A JPS5190604 A JP S5190604A JP 50013475 A JP50013475 A JP 50013475A JP 1347575 A JP1347575 A JP 1347575A JP S5190604 A JPS5190604 A JP S5190604A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1347575A JPS5746544B2 (en:Method) | 1975-02-03 | 1975-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1347575A JPS5746544B2 (en:Method) | 1975-02-03 | 1975-02-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5190604A true JPS5190604A (en:Method) | 1976-08-09 |
| JPS5746544B2 JPS5746544B2 (en:Method) | 1982-10-04 |
Family
ID=11834143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1347575A Expired JPS5746544B2 (en:Method) | 1975-02-03 | 1975-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5746544B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63161453A (ja) * | 1986-12-25 | 1988-07-05 | Kanto Kagaku Kk | レジスト組成物を回収、再使用するための方法および装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6326642U (en:Method) * | 1986-08-06 | 1988-02-22 | ||
| JPH01134641U (en:Method) * | 1988-03-10 | 1989-09-13 |
-
1975
- 1975-02-03 JP JP1347575A patent/JPS5746544B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63161453A (ja) * | 1986-12-25 | 1988-07-05 | Kanto Kagaku Kk | レジスト組成物を回収、再使用するための方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5746544B2 (en:Method) | 1982-10-04 |