JPS5189840A - - Google Patents
Info
- Publication number
- JPS5189840A JPS5189840A JP50015811A JP1581175A JPS5189840A JP S5189840 A JPS5189840 A JP S5189840A JP 50015811 A JP50015811 A JP 50015811A JP 1581175 A JP1581175 A JP 1581175A JP S5189840 A JPS5189840 A JP S5189840A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581175A JPS5757553B2 (en:Method) | 1975-02-05 | 1975-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581175A JPS5757553B2 (en:Method) | 1975-02-05 | 1975-02-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5189840A true JPS5189840A (en:Method) | 1976-08-06 |
| JPS5757553B2 JPS5757553B2 (en:Method) | 1982-12-04 |
Family
ID=11899216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1581175A Expired JPS5757553B2 (en:Method) | 1975-02-05 | 1975-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5757553B2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55168034U (en:Method) * | 1979-05-21 | 1980-12-03 | ||
| JPS56156767A (en) * | 1980-05-02 | 1981-12-03 | Sumitomo Electric Ind Ltd | Highly hard substance covering material |
| JPS62229844A (ja) * | 1986-03-31 | 1987-10-08 | Toshiba Corp | 薄膜堆積方法 |
-
1975
- 1975-02-05 JP JP1581175A patent/JPS5757553B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55168034U (en:Method) * | 1979-05-21 | 1980-12-03 | ||
| JPS56156767A (en) * | 1980-05-02 | 1981-12-03 | Sumitomo Electric Ind Ltd | Highly hard substance covering material |
| JPS62229844A (ja) * | 1986-03-31 | 1987-10-08 | Toshiba Corp | 薄膜堆積方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5757553B2 (en:Method) | 1982-12-04 |