JPS5189840A - - Google Patents

Info

Publication number
JPS5189840A
JPS5189840A JP50015811A JP1581175A JPS5189840A JP S5189840 A JPS5189840 A JP S5189840A JP 50015811 A JP50015811 A JP 50015811A JP 1581175 A JP1581175 A JP 1581175A JP S5189840 A JPS5189840 A JP S5189840A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50015811A
Other languages
Japanese (ja)
Other versions
JPS5757553B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1581175A priority Critical patent/JPS5757553B2/ja
Publication of JPS5189840A publication Critical patent/JPS5189840A/ja
Publication of JPS5757553B2 publication Critical patent/JPS5757553B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1581175A 1975-02-05 1975-02-05 Expired JPS5757553B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1581175A JPS5757553B2 (cg-RX-API-DMAC7.html) 1975-02-05 1975-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1581175A JPS5757553B2 (cg-RX-API-DMAC7.html) 1975-02-05 1975-02-05

Publications (2)

Publication Number Publication Date
JPS5189840A true JPS5189840A (cg-RX-API-DMAC7.html) 1976-08-06
JPS5757553B2 JPS5757553B2 (cg-RX-API-DMAC7.html) 1982-12-04

Family

ID=11899216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1581175A Expired JPS5757553B2 (cg-RX-API-DMAC7.html) 1975-02-05 1975-02-05

Country Status (1)

Country Link
JP (1) JPS5757553B2 (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55168034U (cg-RX-API-DMAC7.html) * 1979-05-21 1980-12-03
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material
JPS62229844A (ja) * 1986-03-31 1987-10-08 Toshiba Corp 薄膜堆積方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55168034U (cg-RX-API-DMAC7.html) * 1979-05-21 1980-12-03
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material
JPS62229844A (ja) * 1986-03-31 1987-10-08 Toshiba Corp 薄膜堆積方法

Also Published As

Publication number Publication date
JPS5757553B2 (cg-RX-API-DMAC7.html) 1982-12-04

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