JPS5188181A - - Google Patents

Info

Publication number
JPS5188181A
JPS5188181A JP50007767A JP776775A JPS5188181A JP S5188181 A JPS5188181 A JP S5188181A JP 50007767 A JP50007767 A JP 50007767A JP 776775 A JP776775 A JP 776775A JP S5188181 A JPS5188181 A JP S5188181A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50007767A
Other languages
Japanese (ja)
Other versions
JPS5421711B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP776775A priority Critical patent/JPS5421711B2/ja
Publication of JPS5188181A publication Critical patent/JPS5188181A/ja
Publication of JPS5421711B2 publication Critical patent/JPS5421711B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP776775A 1975-01-20 1975-01-20 Expired JPS5421711B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP776775A JPS5421711B2 (enrdf_load_stackoverflow) 1975-01-20 1975-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP776775A JPS5421711B2 (enrdf_load_stackoverflow) 1975-01-20 1975-01-20

Publications (2)

Publication Number Publication Date
JPS5188181A true JPS5188181A (enrdf_load_stackoverflow) 1976-08-02
JPS5421711B2 JPS5421711B2 (enrdf_load_stackoverflow) 1979-08-01

Family

ID=11674819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP776775A Expired JPS5421711B2 (enrdf_load_stackoverflow) 1975-01-20 1975-01-20

Country Status (1)

Country Link
JP (1) JPS5421711B2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5334641A (en) * 1976-09-13 1978-03-31 Northern Telecom Ltd Method of and apparatus for controlling terminal point of plasma etching
JPS5355471U (enrdf_load_stackoverflow) * 1976-10-13 1978-05-12
JPS5591829A (en) * 1979-01-02 1980-07-11 Motorola Inc Plasma producing process controller
JPS5759332A (en) * 1980-09-27 1982-04-09 Fujitsu Ltd Method for detecting finishing time of dry etching reaction
JPS5839781A (ja) * 1981-09-02 1983-03-08 Toshiba Corp 反応性イオンエツチング装置
JPS58140126A (ja) * 1982-02-16 1983-08-19 Matsushita Electric Ind Co Ltd ドライエツチング方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492482A (enrdf_load_stackoverflow) * 1972-04-18 1974-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492482A (enrdf_load_stackoverflow) * 1972-04-18 1974-01-10

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5334641A (en) * 1976-09-13 1978-03-31 Northern Telecom Ltd Method of and apparatus for controlling terminal point of plasma etching
JPS5355471U (enrdf_load_stackoverflow) * 1976-10-13 1978-05-12
JPS5591829A (en) * 1979-01-02 1980-07-11 Motorola Inc Plasma producing process controller
JPS63191628U (enrdf_load_stackoverflow) * 1979-01-02 1988-12-09
JPS5759332A (en) * 1980-09-27 1982-04-09 Fujitsu Ltd Method for detecting finishing time of dry etching reaction
JPS5839781A (ja) * 1981-09-02 1983-03-08 Toshiba Corp 反応性イオンエツチング装置
JPS58140126A (ja) * 1982-02-16 1983-08-19 Matsushita Electric Ind Co Ltd ドライエツチング方法

Also Published As

Publication number Publication date
JPS5421711B2 (enrdf_load_stackoverflow) 1979-08-01

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