JPS5187648U - - Google Patents

Info

Publication number
JPS5187648U
JPS5187648U JP730575U JP730575U JPS5187648U JP S5187648 U JPS5187648 U JP S5187648U JP 730575 U JP730575 U JP 730575U JP 730575 U JP730575 U JP 730575U JP S5187648 U JPS5187648 U JP S5187648U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP730575U
Other languages
Japanese (ja)
Other versions
JPS5520746Y2 (sl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP730575U priority Critical patent/JPS5520746Y2/ja
Priority to GB4345975A priority patent/GB1483966A/en
Priority to DE2547552A priority patent/DE2547552B2/de
Priority to US05/625,041 priority patent/US4152478A/en
Publication of JPS5187648U publication Critical patent/JPS5187648U/ja
Priority to US06/011,917 priority patent/US4217855A/en
Application granted granted Critical
Publication of JPS5520746Y2 publication Critical patent/JPS5520746Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP730575U 1974-10-23 1975-01-13 Expired JPS5520746Y2 (sl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP730575U JPS5520746Y2 (sl) 1975-01-13 1975-01-13
GB4345975A GB1483966A (en) 1974-10-23 1975-10-22 Vapourized-metal cluster ion source and ionized-cluster beam deposition
DE2547552A DE2547552B2 (de) 1974-10-23 1975-10-23 Schichtaufdampfverfahren und -einrichtung
US05/625,041 US4152478A (en) 1974-10-23 1975-10-23 Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate
US06/011,917 US4217855A (en) 1974-10-23 1979-02-13 Vaporized-metal cluster ion source and ionized-cluster beam deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP730575U JPS5520746Y2 (sl) 1975-01-13 1975-01-13

Publications (2)

Publication Number Publication Date
JPS5187648U true JPS5187648U (sl) 1976-07-14
JPS5520746Y2 JPS5520746Y2 (sl) 1980-05-19

Family

ID=28073276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP730575U Expired JPS5520746Y2 (sl) 1974-10-23 1975-01-13

Country Status (1)

Country Link
JP (1) JPS5520746Y2 (sl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100480363B1 (ko) * 2002-04-09 2005-03-30 네오뷰코오롱 주식회사 증발 증착 셀

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100480363B1 (ko) * 2002-04-09 2005-03-30 네오뷰코오롱 주식회사 증발 증착 셀

Also Published As

Publication number Publication date
JPS5520746Y2 (sl) 1980-05-19

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