JPS5186985A - - Google Patents

Info

Publication number
JPS5186985A
JPS5186985A JP50011213A JP1121375A JPS5186985A JP S5186985 A JPS5186985 A JP S5186985A JP 50011213 A JP50011213 A JP 50011213A JP 1121375 A JP1121375 A JP 1121375A JP S5186985 A JPS5186985 A JP S5186985A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50011213A
Other languages
Japanese (ja)
Other versions
JPS5810855B2 (ja
Inventor
Ryosaku Kanzawa
Hideyuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50011213A priority Critical patent/JPS5810855B2/ja
Publication of JPS5186985A publication Critical patent/JPS5186985A/ja
Publication of JPS5810855B2 publication Critical patent/JPS5810855B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP50011213A 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ Expired JPS5810855B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50011213A JPS5810855B2 (ja) 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50011213A JPS5810855B2 (ja) 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ

Publications (2)

Publication Number Publication Date
JPS5186985A true JPS5186985A (id) 1976-07-30
JPS5810855B2 JPS5810855B2 (ja) 1983-02-28

Family

ID=11771697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50011213A Expired JPS5810855B2 (ja) 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ

Country Status (1)

Country Link
JP (1) JPS5810855B2 (id)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276653A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 半導体集積回路
JPH01255250A (ja) * 1988-04-05 1989-10-12 Fujitsu Ltd 多層配線形成方法
JPH03291993A (ja) * 1990-04-10 1991-12-24 Fujitsu Ltd ポリイミド多層基板及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107876A (id) * 1974-01-30 1975-08-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107876A (id) * 1974-01-30 1975-08-25

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276653A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 半導体集積回路
JPH01255250A (ja) * 1988-04-05 1989-10-12 Fujitsu Ltd 多層配線形成方法
JPH03291993A (ja) * 1990-04-10 1991-12-24 Fujitsu Ltd ポリイミド多層基板及びその製造方法

Also Published As

Publication number Publication date
JPS5810855B2 (ja) 1983-02-28

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