JPS5186969U - - Google Patents

Info

Publication number
JPS5186969U
JPS5186969U JP357475U JP357475U JPS5186969U JP S5186969 U JPS5186969 U JP S5186969U JP 357475 U JP357475 U JP 357475U JP 357475 U JP357475 U JP 357475U JP S5186969 U JPS5186969 U JP S5186969U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP357475U
Other languages
Japanese (ja)
Other versions
JPS5521341Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975003574U priority Critical patent/JPS5521341Y2/ja
Priority to CA242,588A priority patent/CA1044379A/en
Priority to NL7515149A priority patent/NL7515149A/xx
Priority to DE19752558963 priority patent/DE2558963A1/de
Priority to US05/645,020 priority patent/US4103232A/en
Priority to GB53002/75A priority patent/GB1531429A/en
Publication of JPS5186969U publication Critical patent/JPS5186969U/ja
Application granted granted Critical
Publication of JPS5521341Y2 publication Critical patent/JPS5521341Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1975003574U 1974-12-28 1974-12-28 Expired JPS5521341Y2 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP1975003574U JPS5521341Y2 (it) 1974-12-28 1974-12-28
CA242,588A CA1044379A (en) 1974-12-28 1975-12-24 Wafer transfer device
NL7515149A NL7515149A (nl) 1974-12-28 1975-12-29 Inrichting voor het hanteren van wafels van halfgeleidend materiaal.
DE19752558963 DE2558963A1 (de) 1974-12-28 1975-12-29 Vorrichtung zur anbringung von halbleiterplaettchen
US05/645,020 US4103232A (en) 1974-12-28 1975-12-29 Wafer transfer device
GB53002/75A GB1531429A (en) 1974-12-28 1975-12-29 Apparatus for handling semi-conductor wafers to facilitate making electrical tests on semiconductor devices and testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975003574U JPS5521341Y2 (it) 1974-12-28 1974-12-28

Publications (2)

Publication Number Publication Date
JPS5186969U true JPS5186969U (it) 1976-07-12
JPS5521341Y2 JPS5521341Y2 (it) 1980-05-22

Family

ID=28053580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975003574U Expired JPS5521341Y2 (it) 1974-12-28 1974-12-28

Country Status (1)

Country Link
JP (1) JPS5521341Y2 (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592135U (ja) * 1982-06-28 1984-01-09 株式会社東芝 ウエハ回転装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495670A (it) * 1972-05-02 1974-01-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495670A (it) * 1972-05-02 1974-01-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592135U (ja) * 1982-06-28 1984-01-09 株式会社東芝 ウエハ回転装置

Also Published As

Publication number Publication date
JPS5521341Y2 (it) 1980-05-22

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