JPS5186969U - - Google Patents

Info

Publication number
JPS5186969U
JPS5186969U JP1975003574U JP357475U JPS5186969U JP S5186969 U JPS5186969 U JP S5186969U JP 1975003574 U JP1975003574 U JP 1975003574U JP 357475 U JP357475 U JP 357475U JP S5186969 U JPS5186969 U JP S5186969U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1975003574U
Other languages
Japanese (ja)
Other versions
JPS5521341Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975003574U priority Critical patent/JPS5521341Y2/ja
Priority to CA242,588A priority patent/CA1044379A/en
Priority to NL7515149A priority patent/NL7515149A/xx
Priority to US05/645,020 priority patent/US4103232A/en
Priority to DE19752558963 priority patent/DE2558963A1/de
Priority to GB53002/75A priority patent/GB1531429A/en
Publication of JPS5186969U publication Critical patent/JPS5186969U/ja
Application granted granted Critical
Publication of JPS5521341Y2 publication Critical patent/JPS5521341Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1975003574U 1974-12-28 1974-12-28 Expired JPS5521341Y2 (cg-RX-API-DMAC7.html)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP1975003574U JPS5521341Y2 (cg-RX-API-DMAC7.html) 1974-12-28 1974-12-28
CA242,588A CA1044379A (en) 1974-12-28 1975-12-24 Wafer transfer device
NL7515149A NL7515149A (nl) 1974-12-28 1975-12-29 Inrichting voor het hanteren van wafels van halfgeleidend materiaal.
US05/645,020 US4103232A (en) 1974-12-28 1975-12-29 Wafer transfer device
DE19752558963 DE2558963A1 (de) 1974-12-28 1975-12-29 Vorrichtung zur anbringung von halbleiterplaettchen
GB53002/75A GB1531429A (en) 1974-12-28 1975-12-29 Apparatus for handling semi-conductor wafers to facilitate making electrical tests on semiconductor devices and testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975003574U JPS5521341Y2 (cg-RX-API-DMAC7.html) 1974-12-28 1974-12-28

Publications (2)

Publication Number Publication Date
JPS5186969U true JPS5186969U (cg-RX-API-DMAC7.html) 1976-07-12
JPS5521341Y2 JPS5521341Y2 (cg-RX-API-DMAC7.html) 1980-05-22

Family

ID=28053580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975003574U Expired JPS5521341Y2 (cg-RX-API-DMAC7.html) 1974-12-28 1974-12-28

Country Status (1)

Country Link
JP (1) JPS5521341Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592135U (ja) * 1982-06-28 1984-01-09 株式会社東芝 ウエハ回転装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495670A (cg-RX-API-DMAC7.html) * 1972-05-02 1974-01-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495670A (cg-RX-API-DMAC7.html) * 1972-05-02 1974-01-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS592135U (ja) * 1982-06-28 1984-01-09 株式会社東芝 ウエハ回転装置

Also Published As

Publication number Publication date
JPS5521341Y2 (cg-RX-API-DMAC7.html) 1980-05-22

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