Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK, Nippon Telegraph and Telephone CorpfiledCriticalNihon Denshi KK
Priority to JP49145198ApriorityCriticalpatent/JPS5185330A/ja
Publication of JPS5185330ApublicationCriticalpatent/JPS5185330A/ja
Publication of JPS5541458B2publicationCriticalpatent/JPS5541458B2/ja