JPS5184371U - - Google Patents
Info
- Publication number
- JPS5184371U JPS5184371U JP98775U JP98775U JPS5184371U JP S5184371 U JPS5184371 U JP S5184371U JP 98775 U JP98775 U JP 98775U JP 98775 U JP98775 U JP 98775U JP S5184371 U JPS5184371 U JP S5184371U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP98775U JPS5184371U (en) | 1974-12-26 | 1974-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP98775U JPS5184371U (en) | 1974-12-26 | 1974-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5184371U true JPS5184371U (en) | 1976-07-06 |
Family
ID=33548943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP98775U Pending JPS5184371U (en) | 1974-12-26 | 1974-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5184371U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54125980A (en) * | 1978-03-23 | 1979-09-29 | Nec Corp | Washing device for semiconductor mask cleansing wiper tool |
| JPS55173136U (en) * | 1979-05-28 | 1980-12-12 | ||
| JPS56154148U (en) * | 1980-04-17 | 1981-11-18 | ||
| JPS57124441A (en) * | 1981-01-26 | 1982-08-03 | Toshiba Corp | Control of semiconductor surface reaction |
| JPS601485U (en) * | 1983-06-16 | 1985-01-08 | カネボウ株式会社 | cleaning equipment |
| JPS60143634A (en) * | 1983-12-29 | 1985-07-29 | Fujitsu Ltd | Wafer treatment and device thereof |
| JPH0547724A (en) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | Brush-cleaning apparatus for wafer |
-
1974
- 1974-12-26 JP JP98775U patent/JPS5184371U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54125980A (en) * | 1978-03-23 | 1979-09-29 | Nec Corp | Washing device for semiconductor mask cleansing wiper tool |
| JPS55173136U (en) * | 1979-05-28 | 1980-12-12 | ||
| JPS56154148U (en) * | 1980-04-17 | 1981-11-18 | ||
| JPS57124441A (en) * | 1981-01-26 | 1982-08-03 | Toshiba Corp | Control of semiconductor surface reaction |
| JPS601485U (en) * | 1983-06-16 | 1985-01-08 | カネボウ株式会社 | cleaning equipment |
| JPS60143634A (en) * | 1983-12-29 | 1985-07-29 | Fujitsu Ltd | Wafer treatment and device thereof |
| JPH0547724A (en) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | Brush-cleaning apparatus for wafer |