JPS5183778A - - Google Patents

Info

Publication number
JPS5183778A
JPS5183778A JP50009012A JP901275A JPS5183778A JP S5183778 A JPS5183778 A JP S5183778A JP 50009012 A JP50009012 A JP 50009012A JP 901275 A JP901275 A JP 901275A JP S5183778 A JPS5183778 A JP S5183778A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50009012A
Other languages
Japanese (ja)
Other versions
JPS5739051B2 (enExample
Inventor
Shinichi Yamamoto
Satoshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP901275A priority Critical patent/JPS5739051B2/ja
Publication of JPS5183778A publication Critical patent/JPS5183778A/ja
Publication of JPS5739051B2 publication Critical patent/JPS5739051B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP901275A 1975-01-21 1975-01-21 Expired JPS5739051B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP901275A JPS5739051B2 (enExample) 1975-01-21 1975-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP901275A JPS5739051B2 (enExample) 1975-01-21 1975-01-21

Publications (2)

Publication Number Publication Date
JPS5183778A true JPS5183778A (enExample) 1976-07-22
JPS5739051B2 JPS5739051B2 (enExample) 1982-08-19

Family

ID=11708725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP901275A Expired JPS5739051B2 (enExample) 1975-01-21 1975-01-21

Country Status (1)

Country Link
JP (1) JPS5739051B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381995A (en) * 1976-12-28 1978-07-19 Furukawa Electric Co Ltd:The Submarine installation method of long length material
JPS63134664A (ja) * 1986-11-26 1988-06-07 Hitachi Electronics Eng Co Ltd Ｃｖｄ薄膜形成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5381995A (en) * 1976-12-28 1978-07-19 Furukawa Electric Co Ltd:The Submarine installation method of long length material
JPS63134664A (ja) * 1986-11-26 1988-06-07 Hitachi Electronics Eng Co Ltd Ｃｖｄ薄膜形成装置

Also Published As

Publication number Publication date
JPS5739051B2 (enExample) 1982-08-19

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