JPS5183273U - - Google Patents
Info
- Publication number
- JPS5183273U JPS5183273U JP1975004704U JP470475U JPS5183273U JP S5183273 U JPS5183273 U JP S5183273U JP 1975004704 U JP1975004704 U JP 1975004704U JP 470475 U JP470475 U JP 470475U JP S5183273 U JPS5183273 U JP S5183273U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975004704U JPS5636124Y2 (https=) | 1974-12-25 | 1974-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975004704U JPS5636124Y2 (https=) | 1974-12-25 | 1974-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5183273U true JPS5183273U (https=) | 1976-07-03 |
| JPS5636124Y2 JPS5636124Y2 (https=) | 1981-08-25 |
Family
ID=33111629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975004704U Expired JPS5636124Y2 (https=) | 1974-12-25 | 1974-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636124Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS448842Y1 (https=) * | 1966-10-01 | 1969-04-10 |
-
1974
- 1974-12-25 JP JP1975004704U patent/JPS5636124Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS448842Y1 (https=) * | 1966-10-01 | 1969-04-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5636124Y2 (https=) | 1981-08-25 |