JPS5181790A - - Google Patents
Info
- Publication number
- JPS5181790A JPS5181790A JP50005974A JP597475A JPS5181790A JP S5181790 A JPS5181790 A JP S5181790A JP 50005974 A JP50005974 A JP 50005974A JP 597475 A JP597475 A JP 597475A JP S5181790 A JPS5181790 A JP S5181790A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50005974A JPS5181790A (xx) | 1975-01-14 | 1975-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50005974A JPS5181790A (xx) | 1975-01-14 | 1975-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5181790A true JPS5181790A (xx) | 1976-07-17 |
Family
ID=11625810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50005974A Pending JPS5181790A (xx) | 1975-01-14 | 1975-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5181790A (xx) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4882198A (en) * | 1986-11-26 | 1989-11-21 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| US4951604A (en) * | 1989-02-17 | 1990-08-28 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| CN110846623A (zh) * | 2019-12-12 | 2020-02-28 | 大连理工大学 | 一种用于提高金属蒸发镀膜均匀性的装置及方法 |
-
1975
- 1975-01-14 JP JP50005974A patent/JPS5181790A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4882198A (en) * | 1986-11-26 | 1989-11-21 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| US4951604A (en) * | 1989-02-17 | 1990-08-28 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| CN110846623A (zh) * | 2019-12-12 | 2020-02-28 | 大连理工大学 | 一种用于提高金属蒸发镀膜均匀性的装置及方法 |