JPS5181179A - TANSHOKENCHIHOHO - Google Patents

TANSHOKENCHIHOHO

Info

Publication number
JPS5181179A
JPS5181179A JP572375A JP572375A JPS5181179A JP S5181179 A JPS5181179 A JP S5181179A JP 572375 A JP572375 A JP 572375A JP 572375 A JP572375 A JP 572375A JP S5181179 A JPS5181179 A JP S5181179A
Authority
JP
Japan
Prior art keywords
tanshokenchihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP572375A
Other languages
Japanese (ja)
Inventor
Yoshio Ando
Koji Enami
Norifumi Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP572375A priority Critical patent/JPS5181179A/en
Publication of JPS5181179A publication Critical patent/JPS5181179A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP572375A 1975-01-10 1975-01-10 TANSHOKENCHIHOHO Pending JPS5181179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP572375A JPS5181179A (en) 1975-01-10 1975-01-10 TANSHOKENCHIHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP572375A JPS5181179A (en) 1975-01-10 1975-01-10 TANSHOKENCHIHOHO

Publications (1)

Publication Number Publication Date
JPS5181179A true JPS5181179A (en) 1976-07-15

Family

ID=11619028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP572375A Pending JPS5181179A (en) 1975-01-10 1975-01-10 TANSHOKENCHIHOHO

Country Status (1)

Country Link
JP (1) JPS5181179A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282144A (en) * 1988-09-19 1990-03-22 Omron Tateisi Electron Co Method and device for formation inspection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282144A (en) * 1988-09-19 1990-03-22 Omron Tateisi Electron Co Method and device for formation inspection

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