JPS5181100A - - Google Patents

Info

Publication number
JPS5181100A
JPS5181100A JP50006032A JP603275A JPS5181100A JP S5181100 A JPS5181100 A JP S5181100A JP 50006032 A JP50006032 A JP 50006032A JP 603275 A JP603275 A JP 603275A JP S5181100 A JPS5181100 A JP S5181100A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50006032A
Other languages
Japanese (ja)
Inventor
Kyoshi Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INOE JAPATSUKUSU KENKYUSHO KK
Inoue Japax Research Inc
Original Assignee
INOE JAPATSUKUSU KENKYUSHO KK
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INOE JAPATSUKUSU KENKYUSHO KK, Inoue Japax Research Inc filed Critical INOE JAPATSUKUSU KENKYUSHO KK
Priority to JP50006032A priority Critical patent/JPS5181100A/ja
Publication of JPS5181100A publication Critical patent/JPS5181100A/ja
Pending legal-status Critical Current

Links

JP50006032A 1975-01-13 1975-01-13 Pending JPS5181100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50006032A JPS5181100A (en) 1975-01-13 1975-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50006032A JPS5181100A (en) 1975-01-13 1975-01-13

Publications (1)

Publication Number Publication Date
JPS5181100A true JPS5181100A (en) 1976-07-15

Family

ID=11627304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50006032A Pending JPS5181100A (en) 1975-01-13 1975-01-13

Country Status (1)

Country Link
JP (1) JPS5181100A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130975A (en) * 1977-03-18 1978-11-15 Anvar Method of and device for doping semiconductor substrate
JPS6082285A (en) * 1983-10-07 1985-05-10 Inoue Japax Res Inc Working method of hole or indentation of very small diameter at very small space

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130975A (en) * 1977-03-18 1978-11-15 Anvar Method of and device for doping semiconductor substrate
JPS6082285A (en) * 1983-10-07 1985-05-10 Inoue Japax Res Inc Working method of hole or indentation of very small diameter at very small space
JPH0369638B2 (en) * 1983-10-07 1991-11-01 Inoue Japax Res

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