JPS5181100A - - Google Patents
Info
- Publication number
- JPS5181100A JPS5181100A JP50006032A JP603275A JPS5181100A JP S5181100 A JPS5181100 A JP S5181100A JP 50006032 A JP50006032 A JP 50006032A JP 603275 A JP603275 A JP 603275A JP S5181100 A JPS5181100 A JP S5181100A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50006032A JPS5181100A (en) | 1975-01-13 | 1975-01-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50006032A JPS5181100A (en) | 1975-01-13 | 1975-01-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5181100A true JPS5181100A (en) | 1976-07-15 |
Family
ID=11627304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50006032A Pending JPS5181100A (en) | 1975-01-13 | 1975-01-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5181100A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53130975A (en) * | 1977-03-18 | 1978-11-15 | Anvar | Method of and device for doping semiconductor substrate |
JPS6082285A (en) * | 1983-10-07 | 1985-05-10 | Inoue Japax Res Inc | Working method of hole or indentation of very small diameter at very small space |
-
1975
- 1975-01-13 JP JP50006032A patent/JPS5181100A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53130975A (en) * | 1977-03-18 | 1978-11-15 | Anvar | Method of and device for doping semiconductor substrate |
JPS6082285A (en) * | 1983-10-07 | 1985-05-10 | Inoue Japax Res Inc | Working method of hole or indentation of very small diameter at very small space |
JPH0369638B2 (en) * | 1983-10-07 | 1991-11-01 | Inoue Japax Res |