JPS5180777A - - Google Patents
Info
- Publication number
- JPS5180777A JPS5180777A JP50005633A JP563375A JPS5180777A JP S5180777 A JPS5180777 A JP S5180777A JP 50005633 A JP50005633 A JP 50005633A JP 563375 A JP563375 A JP 563375A JP S5180777 A JPS5180777 A JP S5180777A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50005633A JPS5180777A (enExample) | 1975-01-13 | 1975-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50005633A JPS5180777A (enExample) | 1975-01-13 | 1975-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5180777A true JPS5180777A (enExample) | 1976-07-14 |
Family
ID=11616539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50005633A Pending JPS5180777A (enExample) | 1975-01-13 | 1975-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5180777A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55128821A (en) * | 1979-03-27 | 1980-10-06 | Sanyo Electric Co Ltd | Method of producing epitaxial layer |
| JPS5967632A (ja) * | 1982-10-12 | 1984-04-17 | Oki Electric Ind Co Ltd | ウエハ−アライメントマ−クの保存方法 |
| JPS59172722A (ja) * | 1983-03-23 | 1984-09-29 | Oki Electric Ind Co Ltd | アライメントマ−クの製造方法 |
-
1975
- 1975-01-13 JP JP50005633A patent/JPS5180777A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55128821A (en) * | 1979-03-27 | 1980-10-06 | Sanyo Electric Co Ltd | Method of producing epitaxial layer |
| JPS5967632A (ja) * | 1982-10-12 | 1984-04-17 | Oki Electric Ind Co Ltd | ウエハ−アライメントマ−クの保存方法 |
| JPS59172722A (ja) * | 1983-03-23 | 1984-09-29 | Oki Electric Ind Co Ltd | アライメントマ−クの製造方法 |