JPS5180777A - - Google Patents

Info

Publication number
JPS5180777A
JPS5180777A JP50005633A JP563375A JPS5180777A JP S5180777 A JPS5180777 A JP S5180777A JP 50005633 A JP50005633 A JP 50005633A JP 563375 A JP563375 A JP 563375A JP S5180777 A JPS5180777 A JP S5180777A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50005633A
Other languages
Japanese (ja)
Inventor
Michio Suzuki
Koji Saida
Masahiko Kogirima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50005633A priority Critical patent/JPS5180777A/ja
Publication of JPS5180777A publication Critical patent/JPS5180777A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP50005633A 1975-01-13 1975-01-13 Pending JPS5180777A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50005633A JPS5180777A (enrdf_load_stackoverflow) 1975-01-13 1975-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50005633A JPS5180777A (enrdf_load_stackoverflow) 1975-01-13 1975-01-13

Publications (1)

Publication Number Publication Date
JPS5180777A true JPS5180777A (enrdf_load_stackoverflow) 1976-07-14

Family

ID=11616539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50005633A Pending JPS5180777A (enrdf_load_stackoverflow) 1975-01-13 1975-01-13

Country Status (1)

Country Link
JP (1) JPS5180777A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128821A (en) * 1979-03-27 1980-10-06 Sanyo Electric Co Ltd Method of producing epitaxial layer
JPS5967632A (ja) * 1982-10-12 1984-04-17 Oki Electric Ind Co Ltd ウエハ−アライメントマ−クの保存方法
JPS59172722A (ja) * 1983-03-23 1984-09-29 Oki Electric Ind Co Ltd アライメントマ−クの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128821A (en) * 1979-03-27 1980-10-06 Sanyo Electric Co Ltd Method of producing epitaxial layer
JPS5967632A (ja) * 1982-10-12 1984-04-17 Oki Electric Ind Co Ltd ウエハ−アライメントマ−クの保存方法
JPS59172722A (ja) * 1983-03-23 1984-09-29 Oki Electric Ind Co Ltd アライメントマ−クの製造方法

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