JPS5180161A - - Google Patents

Info

Publication number
JPS5180161A
JPS5180161A JP511175A JP511175A JPS5180161A JP S5180161 A JPS5180161 A JP S5180161A JP 511175 A JP511175 A JP 511175A JP 511175 A JP511175 A JP 511175A JP S5180161 A JPS5180161 A JP S5180161A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP511175A
Other languages
Japanese (ja)
Inventor
Ayao Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK filed Critical Suwa Seikosha KK
Priority to JP511175A priority Critical patent/JPS5180161A/ja
Publication of JPS5180161A publication Critical patent/JPS5180161A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP511175A 1975-01-09 1975-01-09 Pending JPS5180161A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP511175A JPS5180161A (enrdf_load_stackoverflow) 1975-01-09 1975-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP511175A JPS5180161A (enrdf_load_stackoverflow) 1975-01-09 1975-01-09

Publications (1)

Publication Number Publication Date
JPS5180161A true JPS5180161A (enrdf_load_stackoverflow) 1976-07-13

Family

ID=11602230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP511175A Pending JPS5180161A (enrdf_load_stackoverflow) 1975-01-09 1975-01-09

Country Status (1)

Country Link
JP (1) JPS5180161A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法

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