JPS5180161A - - Google Patents
Info
- Publication number
- JPS5180161A JPS5180161A JP511175A JP511175A JPS5180161A JP S5180161 A JPS5180161 A JP S5180161A JP 511175 A JP511175 A JP 511175A JP 511175 A JP511175 A JP 511175A JP S5180161 A JPS5180161 A JP S5180161A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP511175A JPS5180161A (cs) | 1975-01-09 | 1975-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP511175A JPS5180161A (cs) | 1975-01-09 | 1975-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5180161A true JPS5180161A (cs) | 1976-07-13 |
Family
ID=11602230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP511175A Pending JPS5180161A (cs) | 1975-01-09 | 1975-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5180161A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60163436A (ja) * | 1984-02-06 | 1985-08-26 | Seiichiro Sogo | 半導体材料の洗浄乾燥方法 |
-
1975
- 1975-01-09 JP JP511175A patent/JPS5180161A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60163436A (ja) * | 1984-02-06 | 1985-08-26 | Seiichiro Sogo | 半導体材料の洗浄乾燥方法 |