JPS5179582A - Araimentoyokii pataanhogohoho - Google Patents

Araimentoyokii pataanhogohoho

Info

Publication number
JPS5179582A
JPS5179582A JP460875A JP460875A JPS5179582A JP S5179582 A JPS5179582 A JP S5179582A JP 460875 A JP460875 A JP 460875A JP 460875 A JP460875 A JP 460875A JP S5179582 A JPS5179582 A JP S5179582A
Authority
JP
Japan
Prior art keywords
pataanhogohoho
araimentoyokii
araimentoyokii pataanhogohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP460875A
Other languages
Japanese (ja)
Other versions
JPS6022495B2 (en
Inventor
Tadashi Kato
Tomoo Tsurusaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP50004608A priority Critical patent/JPS6022495B2/en
Publication of JPS5179582A publication Critical patent/JPS5179582A/en
Publication of JPS6022495B2 publication Critical patent/JPS6022495B2/en
Expired legal-status Critical Current

Links

JP50004608A 1975-01-07 1975-01-07 Alignment key pattern protection method Expired JPS6022495B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50004608A JPS6022495B2 (en) 1975-01-07 1975-01-07 Alignment key pattern protection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50004608A JPS6022495B2 (en) 1975-01-07 1975-01-07 Alignment key pattern protection method

Publications (2)

Publication Number Publication Date
JPS5179582A true JPS5179582A (en) 1976-07-10
JPS6022495B2 JPS6022495B2 (en) 1985-06-03

Family

ID=11588748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50004608A Expired JPS6022495B2 (en) 1975-01-07 1975-01-07 Alignment key pattern protection method

Country Status (1)

Country Link
JP (1) JPS6022495B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570025A (en) * 1978-10-19 1980-05-27 Censor Patent Versuch Device for projecting and printing mark of mask on semiconductor substrate
JPS566437A (en) * 1979-06-26 1981-01-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Alignment
JPS58159327A (en) * 1982-03-18 1983-09-21 Oki Electric Ind Co Ltd Preserving method for wafer alignment mark
JPS5967631A (en) * 1982-10-12 1984-04-17 Oki Electric Ind Co Ltd Method for wafer alignment
JPH0398052A (en) * 1989-09-11 1991-04-23 Toppan Printing Co Ltd Method for protecting alignment mark

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911578A (en) * 1972-06-02 1974-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911578A (en) * 1972-06-02 1974-02-01

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570025A (en) * 1978-10-19 1980-05-27 Censor Patent Versuch Device for projecting and printing mark of mask on semiconductor substrate
JPS5830736B2 (en) * 1978-10-19 1983-07-01 ツエンゾ−ル・パテント−ウント・フエルズ フス アンシユタルト Equipment for projection printing of mask patterns on semiconductor substrates
JPS566437A (en) * 1979-06-26 1981-01-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Alignment
JPS58159327A (en) * 1982-03-18 1983-09-21 Oki Electric Ind Co Ltd Preserving method for wafer alignment mark
JPS5967631A (en) * 1982-10-12 1984-04-17 Oki Electric Ind Co Ltd Method for wafer alignment
JPS6258139B2 (en) * 1982-10-12 1987-12-04 Oki Electric Ind Co Ltd
JPH0398052A (en) * 1989-09-11 1991-04-23 Toppan Printing Co Ltd Method for protecting alignment mark

Also Published As

Publication number Publication date
JPS6022495B2 (en) 1985-06-03

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