JPS5179582A - Araimentoyokii pataanhogohoho - Google Patents
Araimentoyokii pataanhogohohoInfo
- Publication number
- JPS5179582A JPS5179582A JP460875A JP460875A JPS5179582A JP S5179582 A JPS5179582 A JP S5179582A JP 460875 A JP460875 A JP 460875A JP 460875 A JP460875 A JP 460875A JP S5179582 A JPS5179582 A JP S5179582A
- Authority
- JP
- Japan
- Prior art keywords
- pataanhogohoho
- araimentoyokii
- araimentoyokii pataanhogohoho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50004608A JPS6022495B2 (en) | 1975-01-07 | 1975-01-07 | Alignment key pattern protection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50004608A JPS6022495B2 (en) | 1975-01-07 | 1975-01-07 | Alignment key pattern protection method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5179582A true JPS5179582A (en) | 1976-07-10 |
JPS6022495B2 JPS6022495B2 (en) | 1985-06-03 |
Family
ID=11588748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50004608A Expired JPS6022495B2 (en) | 1975-01-07 | 1975-01-07 | Alignment key pattern protection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6022495B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5570025A (en) * | 1978-10-19 | 1980-05-27 | Censor Patent Versuch | Device for projecting and printing mark of mask on semiconductor substrate |
JPS566437A (en) * | 1979-06-26 | 1981-01-23 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Alignment |
JPS58159327A (en) * | 1982-03-18 | 1983-09-21 | Oki Electric Ind Co Ltd | Preserving method for wafer alignment mark |
JPS5967631A (en) * | 1982-10-12 | 1984-04-17 | Oki Electric Ind Co Ltd | Method for wafer alignment |
JPH0398052A (en) * | 1989-09-11 | 1991-04-23 | Toppan Printing Co Ltd | Method for protecting alignment mark |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911578A (en) * | 1972-06-02 | 1974-02-01 |
-
1975
- 1975-01-07 JP JP50004608A patent/JPS6022495B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911578A (en) * | 1972-06-02 | 1974-02-01 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5570025A (en) * | 1978-10-19 | 1980-05-27 | Censor Patent Versuch | Device for projecting and printing mark of mask on semiconductor substrate |
JPS5830736B2 (en) * | 1978-10-19 | 1983-07-01 | ツエンゾ−ル・パテント−ウント・フエルズ フス アンシユタルト | Equipment for projection printing of mask patterns on semiconductor substrates |
JPS566437A (en) * | 1979-06-26 | 1981-01-23 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Alignment |
JPS58159327A (en) * | 1982-03-18 | 1983-09-21 | Oki Electric Ind Co Ltd | Preserving method for wafer alignment mark |
JPS5967631A (en) * | 1982-10-12 | 1984-04-17 | Oki Electric Ind Co Ltd | Method for wafer alignment |
JPS6258139B2 (en) * | 1982-10-12 | 1987-12-04 | Oki Electric Ind Co Ltd | |
JPH0398052A (en) * | 1989-09-11 | 1991-04-23 | Toppan Printing Co Ltd | Method for protecting alignment mark |
Also Published As
Publication number | Publication date |
---|---|
JPS6022495B2 (en) | 1985-06-03 |
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