JPS5179578A - - Google Patents

Info

Publication number
JPS5179578A
JPS5179578A JP50004378A JP437875A JPS5179578A JP S5179578 A JPS5179578 A JP S5179578A JP 50004378 A JP50004378 A JP 50004378A JP 437875 A JP437875 A JP 437875A JP S5179578 A JPS5179578 A JP S5179578A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50004378A
Other languages
Japanese (ja)
Inventor
Nagaichiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50004378A priority Critical patent/JPS5179578A/ja
Publication of JPS5179578A publication Critical patent/JPS5179578A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50004378A 1975-01-08 1975-01-08 Pending JPS5179578A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50004378A JPS5179578A (enrdf_load_stackoverflow) 1975-01-08 1975-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50004378A JPS5179578A (enrdf_load_stackoverflow) 1975-01-08 1975-01-08

Publications (1)

Publication Number Publication Date
JPS5179578A true JPS5179578A (enrdf_load_stackoverflow) 1976-07-10

Family

ID=11582686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50004378A Pending JPS5179578A (enrdf_load_stackoverflow) 1975-01-08 1975-01-08

Country Status (1)

Country Link
JP (1) JPS5179578A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01158727A (ja) * 1987-12-16 1989-06-21 Nec Kyushu Ltd 縮小投影型露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01158727A (ja) * 1987-12-16 1989-06-21 Nec Kyushu Ltd 縮小投影型露光装置

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