JPS5179575A - - Google Patents
Info
- Publication number
- JPS5179575A JPS5179575A JP10175A JP10175A JPS5179575A JP S5179575 A JPS5179575 A JP S5179575A JP 10175 A JP10175 A JP 10175A JP 10175 A JP10175 A JP 10175A JP S5179575 A JPS5179575 A JP S5179575A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10175A JPS5179575A (US07122547-20061017-C00032.png) | 1975-01-06 | 1975-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10175A JPS5179575A (US07122547-20061017-C00032.png) | 1975-01-06 | 1975-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5179575A true JPS5179575A (US07122547-20061017-C00032.png) | 1976-07-10 |
Family
ID=11464694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10175A Pending JPS5179575A (US07122547-20061017-C00032.png) | 1975-01-06 | 1975-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5179575A (US07122547-20061017-C00032.png) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366376A (en) * | 1976-11-26 | 1978-06-13 | Fujitsu Ltd | Photo mask |
| JPS5679783U (US07122547-20061017-C00032.png) * | 1979-11-27 | 1981-06-27 | ||
| JPS57154242A (en) * | 1981-01-05 | 1982-09-24 | Western Electric Co | Photomask and manufacture thereof |
| JPS5950444A (ja) * | 1982-09-16 | 1984-03-23 | Tokyo Ohka Kogyo Co Ltd | 微細加工用ホトマスク |
| JPS60128449A (ja) * | 1983-12-15 | 1985-07-09 | Hoya Corp | フオトマスクとその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4952977A (US07122547-20061017-C00032.png) * | 1972-09-25 | 1974-05-23 | ||
| JPS49131681A (US07122547-20061017-C00032.png) * | 1973-04-20 | 1974-12-17 |
-
1975
- 1975-01-06 JP JP10175A patent/JPS5179575A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4952977A (US07122547-20061017-C00032.png) * | 1972-09-25 | 1974-05-23 | ||
| JPS49131681A (US07122547-20061017-C00032.png) * | 1973-04-20 | 1974-12-17 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366376A (en) * | 1976-11-26 | 1978-06-13 | Fujitsu Ltd | Photo mask |
| JPS5427707B2 (US07122547-20061017-C00032.png) * | 1976-11-26 | 1979-09-11 | ||
| JPS5679783U (US07122547-20061017-C00032.png) * | 1979-11-27 | 1981-06-27 | ||
| JPS639827Y2 (US07122547-20061017-C00032.png) * | 1979-11-27 | 1988-03-23 | ||
| JPS57154242A (en) * | 1981-01-05 | 1982-09-24 | Western Electric Co | Photomask and manufacture thereof |
| JPH0213780B2 (US07122547-20061017-C00032.png) * | 1981-01-05 | 1990-04-05 | Ei Teii Ando Teii Tekunorojiizu Inc | |
| JPS5950444A (ja) * | 1982-09-16 | 1984-03-23 | Tokyo Ohka Kogyo Co Ltd | 微細加工用ホトマスク |
| JPS60128449A (ja) * | 1983-12-15 | 1985-07-09 | Hoya Corp | フオトマスクとその製造方法 |
