JPS5179574A - cvd sochi - Google Patents

cvd sochi

Info

Publication number
JPS5179574A
JPS5179574A JP438175A JP438175A JPS5179574A JP S5179574 A JPS5179574 A JP S5179574A JP 438175 A JP438175 A JP 438175A JP 438175 A JP438175 A JP 438175A JP S5179574 A JPS5179574 A JP S5179574A
Authority
JP
Japan
Prior art keywords
sochi
cvd
cvd sochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP438175A
Other languages
Japanese (ja)
Inventor
Kinya Sugimoto
Makoto Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP438175A priority Critical patent/JPS5179574A/en
Publication of JPS5179574A publication Critical patent/JPS5179574A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP438175A 1975-01-08 1975-01-08 cvd sochi Pending JPS5179574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP438175A JPS5179574A (en) 1975-01-08 1975-01-08 cvd sochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP438175A JPS5179574A (en) 1975-01-08 1975-01-08 cvd sochi

Publications (1)

Publication Number Publication Date
JPS5179574A true JPS5179574A (en) 1976-07-10

Family

ID=11582767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP438175A Pending JPS5179574A (en) 1975-01-08 1975-01-08 cvd sochi

Country Status (1)

Country Link
JP (1) JPS5179574A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121234A (en) * 1981-01-20 1982-07-28 Matsushita Electronics Corp Plasma processing and device thereof
JPS58140170U (en) * 1982-03-16 1983-09-21 株式会社東芝 carbonization equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332167Y1 (en) * 1966-09-29 1968-12-27
JPS4424426Y1 (en) * 1967-07-20 1969-10-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4332167Y1 (en) * 1966-09-29 1968-12-27
JPS4424426Y1 (en) * 1967-07-20 1969-10-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121234A (en) * 1981-01-20 1982-07-28 Matsushita Electronics Corp Plasma processing and device thereof
JPS58140170U (en) * 1982-03-16 1983-09-21 株式会社東芝 carbonization equipment

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