JPS5175174A - - Google Patents

Info

Publication number
JPS5175174A
JPS5175174A JP49148304A JP14830474A JPS5175174A JP S5175174 A JPS5175174 A JP S5175174A JP 49148304 A JP49148304 A JP 49148304A JP 14830474 A JP14830474 A JP 14830474A JP S5175174 A JPS5175174 A JP S5175174A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49148304A
Other languages
Japanese (ja)
Other versions
JPS5622981B2 (enrdf_load_stackoverflow
Inventor
Kyoshi Uno
Hidenori Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP14830474A priority Critical patent/JPS5622981B2/ja
Publication of JPS5175174A publication Critical patent/JPS5175174A/ja
Publication of JPS5622981B2 publication Critical patent/JPS5622981B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Inorganic Fibers (AREA)
  • Nonwoven Fabrics (AREA)
JP14830474A 1974-12-26 1974-12-26 Expired JPS5622981B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14830474A JPS5622981B2 (enrdf_load_stackoverflow) 1974-12-26 1974-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14830474A JPS5622981B2 (enrdf_load_stackoverflow) 1974-12-26 1974-12-26

Publications (2)

Publication Number Publication Date
JPS5175174A true JPS5175174A (enrdf_load_stackoverflow) 1976-06-29
JPS5622981B2 JPS5622981B2 (enrdf_load_stackoverflow) 1981-05-28

Family

ID=15449781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14830474A Expired JPS5622981B2 (enrdf_load_stackoverflow) 1974-12-26 1974-12-26

Country Status (1)

Country Link
JP (1) JPS5622981B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1076519C (zh) * 1993-12-28 2001-12-19 松下电器产业株式会社 半导体器件的制造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1076519C (zh) * 1993-12-28 2001-12-19 松下电器产业株式会社 半导体器件的制造方法

Also Published As

Publication number Publication date
JPS5622981B2 (enrdf_load_stackoverflow) 1981-05-28

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