JPS517469B2 - - Google Patents
Info
- Publication number
- JPS517469B2 JPS517469B2 JP7430472A JP7430472A JPS517469B2 JP S517469 B2 JPS517469 B2 JP S517469B2 JP 7430472 A JP7430472 A JP 7430472A JP 7430472 A JP7430472 A JP 7430472A JP S517469 B2 JPS517469 B2 JP S517469B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7430472A JPS517469B2 (de) | 1972-07-25 | 1972-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7430472A JPS517469B2 (de) | 1972-07-25 | 1972-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4932837A JPS4932837A (de) | 1974-03-26 |
| JPS517469B2 true JPS517469B2 (de) | 1976-03-08 |
Family
ID=13543241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7430472A Expired JPS517469B2 (de) | 1972-07-25 | 1972-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS517469B2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186311A (ja) * | 1984-07-04 | 1986-05-01 | Hitachi Ltd | 半導体ウェハ移送装置 |
-
1972
- 1972-07-25 JP JP7430472A patent/JPS517469B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4932837A (de) | 1974-03-26 |