JPS5173389A - Gasupurazumanyoruhotorejisutomakuno jokyoho - Google Patents

Gasupurazumanyoruhotorejisutomakuno jokyoho

Info

Publication number
JPS5173389A
JPS5173389A JP14681574A JP14681574A JPS5173389A JP S5173389 A JPS5173389 A JP S5173389A JP 14681574 A JP14681574 A JP 14681574A JP 14681574 A JP14681574 A JP 14681574A JP S5173389 A JPS5173389 A JP S5173389A
Authority
JP
Japan
Prior art keywords
jokyoho
gasupurazumanyoruhotorejisutomakuno
gasupurazumanyoruhotorejisutomakuno jokyoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14681574A
Other languages
English (en)
Inventor
Yoshiaki Okajima
Kazuo Tanno
Takuzo Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14681574A priority Critical patent/JPS5173389A/ja
Publication of JPS5173389A publication Critical patent/JPS5173389A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP14681574A 1974-12-23 1974-12-23 Gasupurazumanyoruhotorejisutomakuno jokyoho Pending JPS5173389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14681574A JPS5173389A (ja) 1974-12-23 1974-12-23 Gasupurazumanyoruhotorejisutomakuno jokyoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14681574A JPS5173389A (ja) 1974-12-23 1974-12-23 Gasupurazumanyoruhotorejisutomakuno jokyoho

Publications (1)

Publication Number Publication Date
JPS5173389A true JPS5173389A (ja) 1976-06-25

Family

ID=15416144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14681574A Pending JPS5173389A (ja) 1974-12-23 1974-12-23 Gasupurazumanyoruhotorejisutomakuno jokyoho

Country Status (1)

Country Link
JP (1) JPS5173389A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307178A (en) * 1980-04-30 1981-12-22 International Business Machines Corporation Plasma develoment of resists

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307178A (en) * 1980-04-30 1981-12-22 International Business Machines Corporation Plasma develoment of resists

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