JPS5171236A - Etsuchingueki - Google Patents

Etsuchingueki

Info

Publication number
JPS5171236A
JPS5171236A JP14612074A JP14612074A JPS5171236A JP S5171236 A JPS5171236 A JP S5171236A JP 14612074 A JP14612074 A JP 14612074A JP 14612074 A JP14612074 A JP 14612074A JP S5171236 A JPS5171236 A JP S5171236A
Authority
JP
Japan
Prior art keywords
etsuchingueki
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14612074A
Other languages
English (en)
Inventor
Hisao Kumabe
Masaaki Nakatani
Hidejiro Miki
Michihiro Ito
Chikayuki Ootsubo
Toshihiko Hatsuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14612074A priority Critical patent/JPS5171236A/ja
Publication of JPS5171236A publication Critical patent/JPS5171236A/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP14612074A 1974-12-18 1974-12-18 Etsuchingueki Pending JPS5171236A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14612074A JPS5171236A (ja) 1974-12-18 1974-12-18 Etsuchingueki

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14612074A JPS5171236A (ja) 1974-12-18 1974-12-18 Etsuchingueki

Publications (1)

Publication Number Publication Date
JPS5171236A true JPS5171236A (ja) 1976-06-19

Family

ID=15400596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14612074A Pending JPS5171236A (ja) 1974-12-18 1974-12-18 Etsuchingueki

Country Status (1)

Country Link
JP (1) JPS5171236A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58182832A (ja) * 1982-04-20 1983-10-25 Mitsubishi Electric Corp ＧａＡｓ基板のエツチング方法
JPS59222935A (ja) * 1983-06-01 1984-12-14 Matsushita Electric Ind Co Ltd ＧａＡｓ半導体装置の製造方法
JPH02210830A (ja) * 1989-02-10 1990-08-22 Matsushita Electric Ind Co Ltd ＧａＡｓ基板の表面処理方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58182832A (ja) * 1982-04-20 1983-10-25 Mitsubishi Electric Corp ＧａＡｓ基板のエツチング方法
JPH0415616B2 (ja) * 1982-04-20 1992-03-18 Mitsubishi Electric Corp
JPS59222935A (ja) * 1983-06-01 1984-12-14 Matsushita Electric Ind Co Ltd ＧａＡｓ半導体装置の製造方法
JPH02210830A (ja) * 1989-02-10 1990-08-22 Matsushita Electric Ind Co Ltd ＧａＡｓ基板の表面処理方法

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