JPS5168188A - Judentaizetsuenbunrikibannoseiho - Google Patents

Judentaizetsuenbunrikibannoseiho

Info

Publication number
JPS5168188A
JPS5168188A JP14156374A JP14156374A JPS5168188A JP S5168188 A JPS5168188 A JP S5168188A JP 14156374 A JP14156374 A JP 14156374A JP 14156374 A JP14156374 A JP 14156374A JP S5168188 A JPS5168188 A JP S5168188A
Authority
JP
Japan
Prior art keywords
judentaizetsuenbunriki
bannoseiho
judentaizetsuenbunriki bannoseiho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14156374A
Other languages
English (en)
Other versions
JPS5329585B2 (ja
Inventor
Akio Mimura
Takaya Suzuki
Setsuo Yagyu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14156374A priority Critical patent/JPS5168188A/ja
Publication of JPS5168188A publication Critical patent/JPS5168188A/ja
Publication of JPS5329585B2 publication Critical patent/JPS5329585B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP14156374A 1974-12-11 1974-12-11 Judentaizetsuenbunrikibannoseiho Granted JPS5168188A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14156374A JPS5168188A (ja) 1974-12-11 1974-12-11 Judentaizetsuenbunrikibannoseiho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14156374A JPS5168188A (ja) 1974-12-11 1974-12-11 Judentaizetsuenbunrikibannoseiho

Publications (2)

Publication Number Publication Date
JPS5168188A true JPS5168188A (ja) 1976-06-12
JPS5329585B2 JPS5329585B2 (ja) 1978-08-22

Family

ID=15294870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14156374A Granted JPS5168188A (ja) 1974-12-11 1974-12-11 Judentaizetsuenbunrikibannoseiho

Country Status (1)

Country Link
JP (1) JPS5168188A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353961A (en) * 1976-10-27 1978-05-16 Oki Electric Ind Co Ltd Production of semiconductor wafer
JPH0653102A (ja) * 1992-08-03 1994-02-25 Hitachi Ltd 誘電体分離基板
DE102014109260A1 (de) 2013-07-03 2015-01-08 Fanuc Corporation Lüfterabdeckung mit schwingungsgedämpftem Lüftermotor sowie Antriebseinheit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353961A (en) * 1976-10-27 1978-05-16 Oki Electric Ind Co Ltd Production of semiconductor wafer
JPH0653102A (ja) * 1992-08-03 1994-02-25 Hitachi Ltd 誘電体分離基板
DE102014109260A1 (de) 2013-07-03 2015-01-08 Fanuc Corporation Lüfterabdeckung mit schwingungsgedämpftem Lüftermotor sowie Antriebseinheit

Also Published As

Publication number Publication date
JPS5329585B2 (ja) 1978-08-22

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