JPS5167274A - - Google Patents
Info
- Publication number
- JPS5167274A JPS5167274A JP49141403A JP14140374A JPS5167274A JP S5167274 A JPS5167274 A JP S5167274A JP 49141403 A JP49141403 A JP 49141403A JP 14140374 A JP14140374 A JP 14140374A JP S5167274 A JPS5167274 A JP S5167274A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49141403A JPS5167274A (enExample) | 1974-12-09 | 1974-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49141403A JPS5167274A (enExample) | 1974-12-09 | 1974-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5167274A true JPS5167274A (enExample) | 1976-06-10 |
Family
ID=15291180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49141403A Pending JPS5167274A (enExample) | 1974-12-09 | 1974-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5167274A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5562567U (enExample) * | 1978-10-20 | 1980-04-28 | ||
| JPS62116233A (ja) * | 1985-11-15 | 1987-05-27 | Hitachi Koki Co Ltd | イオンビ−ム照射装置 |
-
1974
- 1974-12-09 JP JP49141403A patent/JPS5167274A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5562567U (enExample) * | 1978-10-20 | 1980-04-28 | ||
| JPS62116233A (ja) * | 1985-11-15 | 1987-05-27 | Hitachi Koki Co Ltd | イオンビ−ム照射装置 |