JPS5167274A - - Google Patents

Info

Publication number
JPS5167274A
JPS5167274A JP49141403A JP14140374A JPS5167274A JP S5167274 A JPS5167274 A JP S5167274A JP 49141403 A JP49141403 A JP 49141403A JP 14140374 A JP14140374 A JP 14140374A JP S5167274 A JPS5167274 A JP S5167274A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49141403A
Other languages
Japanese (ja)
Inventor
Tsutomu Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN BARIAN KK
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN BARIAN KK
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN BARIAN KK, NICHIDEN VARIAN KK filed Critical NICHIDEN BARIAN KK
Priority to JP49141403A priority Critical patent/JPS5167274A/ja
Publication of JPS5167274A publication Critical patent/JPS5167274A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP49141403A 1974-12-09 1974-12-09 Pending JPS5167274A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49141403A JPS5167274A (enrdf_load_stackoverflow) 1974-12-09 1974-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49141403A JPS5167274A (enrdf_load_stackoverflow) 1974-12-09 1974-12-09

Publications (1)

Publication Number Publication Date
JPS5167274A true JPS5167274A (enrdf_load_stackoverflow) 1976-06-10

Family

ID=15291180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49141403A Pending JPS5167274A (enrdf_load_stackoverflow) 1974-12-09 1974-12-09

Country Status (1)

Country Link
JP (1) JPS5167274A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562567U (enrdf_load_stackoverflow) * 1978-10-20 1980-04-28
JPS62116233A (ja) * 1985-11-15 1987-05-27 Hitachi Koki Co Ltd イオンビ−ム照射装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562567U (enrdf_load_stackoverflow) * 1978-10-20 1980-04-28
JPS62116233A (ja) * 1985-11-15 1987-05-27 Hitachi Koki Co Ltd イオンビ−ム照射装置

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