JPS5165576A - - Google Patents

Info

Publication number
JPS5165576A
JPS5165576A JP49138353A JP13835374A JPS5165576A JP S5165576 A JPS5165576 A JP S5165576A JP 49138353 A JP49138353 A JP 49138353A JP 13835374 A JP13835374 A JP 13835374A JP S5165576 A JPS5165576 A JP S5165576A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49138353A
Other languages
Japanese (ja)
Inventor
Takashi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49138353A priority Critical patent/JPS5165576A/ja
Publication of JPS5165576A publication Critical patent/JPS5165576A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP49138353A 1974-12-04 1974-12-04 Pending JPS5165576A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49138353A JPS5165576A (enrdf_load_stackoverflow) 1974-12-04 1974-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49138353A JPS5165576A (enrdf_load_stackoverflow) 1974-12-04 1974-12-04

Publications (1)

Publication Number Publication Date
JPS5165576A true JPS5165576A (enrdf_load_stackoverflow) 1976-06-07

Family

ID=15219937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49138353A Pending JPS5165576A (enrdf_load_stackoverflow) 1974-12-04 1974-12-04

Country Status (1)

Country Link
JP (1) JPS5165576A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208854A (ja) * 1984-04-03 1985-10-21 Agency Of Ind Science & Technol 半導体立体回路素子の製造方法
JP2007318125A (ja) * 2006-05-15 2007-12-06 Toshiba Corp Ｓｏｉおよびｈｏｔ半導体装置上のｌｏｃｏｓおよびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208854A (ja) * 1984-04-03 1985-10-21 Agency Of Ind Science & Technol 半導体立体回路素子の製造方法
JP2007318125A (ja) * 2006-05-15 2007-12-06 Toshiba Corp Ｓｏｉおよびｈｏｔ半導体装置上のｌｏｃｏｓおよびその製造方法

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