JPS5164866A - HANDOTAISOCHINOSEIZOHOHO - Google Patents

HANDOTAISOCHINOSEIZOHOHO

Info

Publication number
JPS5164866A
JPS5164866A JP13908674A JP13908674A JPS5164866A JP S5164866 A JPS5164866 A JP S5164866A JP 13908674 A JP13908674 A JP 13908674A JP 13908674 A JP13908674 A JP 13908674A JP S5164866 A JPS5164866 A JP S5164866A
Authority
JP
Japan
Prior art keywords
handotaisochinoseizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13908674A
Other languages
Japanese (ja)
Inventor
Koichiro Takahata
Katsuharu Shimizu
Masashi Mukogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP13908674A priority Critical patent/JPS5164866A/en
Publication of JPS5164866A publication Critical patent/JPS5164866A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP13908674A 1974-12-03 1974-12-03 HANDOTAISOCHINOSEIZOHOHO Pending JPS5164866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13908674A JPS5164866A (en) 1974-12-03 1974-12-03 HANDOTAISOCHINOSEIZOHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13908674A JPS5164866A (en) 1974-12-03 1974-12-03 HANDOTAISOCHINOSEIZOHOHO

Publications (1)

Publication Number Publication Date
JPS5164866A true JPS5164866A (en) 1976-06-04

Family

ID=15237150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13908674A Pending JPS5164866A (en) 1974-12-03 1974-12-03 HANDOTAISOCHINOSEIZOHOHO

Country Status (1)

Country Link
JP (1) JPS5164866A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005104250A1 (en) * 2004-04-20 2005-11-03 Showa Denko K.K. Production method of compound semiconductor light-emitting device wafer
JP2009152289A (en) * 2007-12-19 2009-07-09 Tokyo Seimitsu Co Ltd Laser dicing apparatus and dicing method
JP2009525183A (en) * 2006-02-02 2009-07-09 エグシル テクノロジー リミテッド Laser processing apparatus and method comprising a vacuum evacuation system and at least a first containment zone to contain a deposit of released hazardous material

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005104250A1 (en) * 2004-04-20 2005-11-03 Showa Denko K.K. Production method of compound semiconductor light-emitting device wafer
EP1738419A1 (en) * 2004-04-20 2007-01-03 Showa Denko K.K. Production method of compound semiconductor light-emitting device wafer
US7700413B2 (en) 2004-04-20 2010-04-20 Showa Denko K.K. Production method of compound semiconductor light-emitting device wafer
EP1738419A4 (en) * 2004-04-20 2011-07-06 Showa Denko Kk Production method of compound semiconductor light-emitting device wafer
JP2009525183A (en) * 2006-02-02 2009-07-09 エグシル テクノロジー リミテッド Laser processing apparatus and method comprising a vacuum evacuation system and at least a first containment zone to contain a deposit of released hazardous material
JP2009152289A (en) * 2007-12-19 2009-07-09 Tokyo Seimitsu Co Ltd Laser dicing apparatus and dicing method

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