Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
National Institute of Advanced Industrial Science and Technology
NTT Inc
Original Assignee
Agency of Industrial Science and Technology
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Nihon Denshi KK, Nippon Telegraph and Telephone CorpfiledCriticalAgency of Industrial Science and Technology
Priority to JP13806074ApriorityCriticalpatent/JPS534433B2/ja
Publication of JPS5162783ApublicationCriticalpatent/JPS5162783A/ja
Publication of JPS534433B2publicationCriticalpatent/JPS534433B2/ja