JPS5162179A - Shitsushikishorigonohaigasunoshoonhoho - Google Patents

Shitsushikishorigonohaigasunoshoonhoho

Info

Publication number
JPS5162179A
JPS5162179A JP49135920A JP13592074A JPS5162179A JP S5162179 A JPS5162179 A JP S5162179A JP 49135920 A JP49135920 A JP 49135920A JP 13592074 A JP13592074 A JP 13592074A JP S5162179 A JPS5162179 A JP S5162179A
Authority
JP
Japan
Prior art keywords
shitsushi
kishorigonohaigasunoshoonhoho
shitsushi kishorigonohaigasunoshoonhoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49135920A
Other languages
English (en)
Inventor
Yasuaki Ishikawa
Masayuki Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kokan Ltd filed Critical Nippon Kokan Ltd
Priority to JP49135920A priority Critical patent/JPS5162179A/ja
Publication of JPS5162179A publication Critical patent/JPS5162179A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chimneys And Flues (AREA)
  • Treating Waste Gases (AREA)
JP49135920A 1974-11-28 1974-11-28 Shitsushikishorigonohaigasunoshoonhoho Pending JPS5162179A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49135920A JPS5162179A (ja) 1974-11-28 1974-11-28 Shitsushikishorigonohaigasunoshoonhoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49135920A JPS5162179A (ja) 1974-11-28 1974-11-28 Shitsushikishorigonohaigasunoshoonhoho

Publications (1)

Publication Number Publication Date
JPS5162179A true JPS5162179A (ja) 1976-05-29

Family

ID=15162928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49135920A Pending JPS5162179A (ja) 1974-11-28 1974-11-28 Shitsushikishorigonohaigasunoshoonhoho

Country Status (1)

Country Link
JP (1) JPS5162179A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160150606A (ko) 2015-06-22 2016-12-30 도쿄엘렉트론가부시키가이샤 적층 밀봉막 형성 방법 및 형성 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830665A (ja) * 1971-08-24 1973-04-23
JPS4834765A (ja) * 1971-09-08 1973-05-22
JPS4914073A (ja) * 1972-05-16 1974-02-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830665A (ja) * 1971-08-24 1973-04-23
JPS4834765A (ja) * 1971-09-08 1973-05-22
JPS4914073A (ja) * 1972-05-16 1974-02-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160150606A (ko) 2015-06-22 2016-12-30 도쿄엘렉트론가부시키가이샤 적층 밀봉막 형성 방법 및 형성 장치

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