JPS5157161A - - Google Patents

Info

Publication number
JPS5157161A
JPS5157161A JP13043574A JP13043574A JPS5157161A JP S5157161 A JPS5157161 A JP S5157161A JP 13043574 A JP13043574 A JP 13043574A JP 13043574 A JP13043574 A JP 13043574A JP S5157161 A JPS5157161 A JP S5157161A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13043574A
Other languages
Japanese (ja)
Other versions
JPS5318378B2 (cs
Inventor
Makoto Naito
Tetsuo Sadamasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13043574A priority Critical patent/JPS5318378B2/ja
Publication of JPS5157161A publication Critical patent/JPS5157161A/ja
Publication of JPS5318378B2 publication Critical patent/JPS5318378B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
JP13043574A 1974-11-14 1974-11-14 Expired JPS5318378B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13043574A JPS5318378B2 (cs) 1974-11-14 1974-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13043574A JPS5318378B2 (cs) 1974-11-14 1974-11-14

Publications (2)

Publication Number Publication Date
JPS5157161A true JPS5157161A (cs) 1976-05-19
JPS5318378B2 JPS5318378B2 (cs) 1978-06-14

Family

ID=15034154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13043574A Expired JPS5318378B2 (cs) 1974-11-14 1974-11-14

Country Status (1)

Country Link
JP (1) JPS5318378B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118369A (en) * 1975-04-10 1976-10-18 Matsushita Electric Ind Co Ltd Manufacturing process for simiconduator unit
JPS58141524A (ja) * 1982-02-17 1983-08-22 Hitachi Ltd 拡散マスクの形成法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832469A (cs) * 1971-08-31 1973-04-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832469A (cs) * 1971-08-31 1973-04-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118369A (en) * 1975-04-10 1976-10-18 Matsushita Electric Ind Co Ltd Manufacturing process for simiconduator unit
JPS58141524A (ja) * 1982-02-17 1983-08-22 Hitachi Ltd 拡散マスクの形成法

Also Published As

Publication number Publication date
JPS5318378B2 (cs) 1978-06-14

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