JPS5154391U - - Google Patents
Info
- Publication number
- JPS5154391U JPS5154391U JP12932274U JP12932274U JPS5154391U JP S5154391 U JPS5154391 U JP S5154391U JP 12932274 U JP12932274 U JP 12932274U JP 12932274 U JP12932274 U JP 12932274U JP S5154391 U JPS5154391 U JP S5154391U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12932274U JPS5231981Y2 (cg-RX-API-DMAC7.html) | 1974-10-23 | 1974-10-23 | |
| GB4345975A GB1483966A (en) | 1974-10-23 | 1975-10-22 | Vapourized-metal cluster ion source and ionized-cluster beam deposition |
| US05/625,041 US4152478A (en) | 1974-10-23 | 1975-10-23 | Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate |
| DE2547552A DE2547552B2 (de) | 1974-10-23 | 1975-10-23 | Schichtaufdampfverfahren und -einrichtung |
| US06/011,917 US4217855A (en) | 1974-10-23 | 1979-02-13 | Vaporized-metal cluster ion source and ionized-cluster beam deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12932274U JPS5231981Y2 (cg-RX-API-DMAC7.html) | 1974-10-23 | 1974-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5154391U true JPS5154391U (cg-RX-API-DMAC7.html) | 1976-04-26 |
| JPS5231981Y2 JPS5231981Y2 (cg-RX-API-DMAC7.html) | 1977-07-21 |
Family
ID=28386811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12932274U Expired JPS5231981Y2 (cg-RX-API-DMAC7.html) | 1974-10-23 | 1974-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5231981Y2 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6093505U (ja) * | 1983-12-02 | 1985-06-26 | 東海キヤスター株式会社 | キャスタ |
-
1974
- 1974-10-23 JP JP12932274U patent/JPS5231981Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6093505U (ja) * | 1983-12-02 | 1985-06-26 | 東海キヤスター株式会社 | キャスタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5231981Y2 (cg-RX-API-DMAC7.html) | 1977-07-21 |